NEWTON: A Library-Based Analytical Synthesis Tool for RF-MEMS Resonators - Robotics Institute Carnegie Mellon University

NEWTON: A Library-Based Analytical Synthesis Tool for RF-MEMS Resonators

M. S. McCorquodale, James McCann, and R. B. Brown
Conference Paper, Proceedings of 11th Asia and South Pacific Design Automation Conference (ASP-DAC '06), January, 2006

Abstract

Newton is a library-based CAD tool with an analytical synthesis engine which has been developed to support the direct synthesis of the physical design and an electromechanically equivalent model of RF-MEMS resonators based on process parameters and performance metrics. Newton provides accuracy comparable to finite element analysis while requiring a fraction of the computation and design time. A comparison of results from synthesis with Newton, design with FEA, and test results from fabricated devices is presented.

BibTeX

@conference{McCorquodale-2006-113397,
author = {M. S. McCorquodale and James McCann and R. B. Brown},
title = {NEWTON: A Library-Based Analytical Synthesis Tool for RF-MEMS Resonators},
booktitle = {Proceedings of 11th Asia and South Pacific Design Automation Conference (ASP-DAC '06)},
year = {2006},
month = {January},
}