The increasing integration of MEMS has pushed the demand for CAD tools to support rapid design of systems involving physical interactions between multiple domains such as electrical, mechanical, and thermal. At present, MEMS simulation is most often performed using direct numerical simulation or signal flow analysis that is arduous and time consuming for system design due to its low level of abstraction. In contrast, nodal simulation enables a structured representation for MEMS design using a hierarchical set of MEM components. Such an example is NODASv1.4 created by Carnegie Mellon’s MEMS LAB.