Tactile Displays Using MEMS Actuator Arrays
Project Head: Gary K. Fedder
We are developing tactile dusplays using MEMS actuator arrays. The 24 actuators on the 1cm x 1cm die were made using a two-layer polysilicon surface micromachining process along with a final metal layer. Polysilicon is used as the structural material, deposited oxide (PSG) as the sacrificial material, and silicon nitride for electrical isolation from the substrate. Various designs were implemented on a single die for further testing.
