A Vision of Structured CAD for MEMS
Workshop Paper, 5th ACM/SIGDA Physical Design Workshop, pp. 76 - 80, April, 1996
Abstract
Computer-aided design tools tailored for microelectromechanical systems (MEMS) are needed to enable design of complex systems with multiple energy domains. In an analogy to the VLSI design methodology, physical, structural, and behavioral views of MEMS can be formed and coupled together in an integrated toolset. Of key importance is the formation of parameterized MEMS component libraries to support these views. Fast coupled-domain numerical (physical) simulation and behavioral simulation are required to move freely between the views.
BibTeX
@workshop{Fedder-1996-14116,author = {Gary K. Fedder},
title = {A Vision of Structured CAD for MEMS},
booktitle = {Proceedings of 5th ACM/SIGDA Physical Design Workshop},
year = {1996},
month = {April},
pages = {76 - 80},
}
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