In Situ Fabricated Microchannels Using Porous Polymer and Xenon Difluoride Etchant
Conference Paper, Proceedings of 6th International Symposium on Micro Total Analysis System (mTAS '02), November, 2002
Abstract
A novel microfluidic fabrication technique which allows in situ formed silicon microchannels and does not necessitate substrate bonding is presented. A gas-permeable polymer membrane acts as the top surface of the microchannel, allowing xenon difluoride (XeF2) etchant to pass unobstructed to the silicon substrate. Exposed silicon areas on the wafer are then etched isotropically.
BibTeX
@conference{Subrebost-2002-8589,author = {George Lopez Subrebost and Alan J. Rosenbloom and Victor Weedn and Kaigham Gabriel},
title = {In Situ Fabricated Microchannels Using Porous Polymer and Xenon Difluoride Etchant},
booktitle = {Proceedings of 6th International Symposium on Micro Total Analysis System (mTAS '02)},
year = {2002},
month = {November},
keywords = {Microchannels, Xenon difluoride, Porous polymer},
}
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