Micromechanical Vibratory Rate Gyroscopes Fabricated in Conventional CMOS - Robotics Institute Carnegie Mellon University

Micromechanical Vibratory Rate Gyroscopes Fabricated in Conventional CMOS

Gary K. Fedder and M. Kranz
Conference Paper, Proceedings of Gyro Technology Symposium, pp. 30 - 38, September, 1997

BibTeX

@conference{Fedder-1997-16424,
author = {Gary K. Fedder and M. Kranz},
title = {Micromechanical Vibratory Rate Gyroscopes Fabricated in Conventional CMOS},
booktitle = {Proceedings of Gyro Technology Symposium},
year = {1997},
month = {September},
pages = {30 - 38},
}
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