Remote High Speed Measurement of Small Diameters by Optical Diffractometry and Interferometry - Robotics Institute Carnegie Mellon University

Remote High Speed Measurement of Small Diameters by Optical Diffractometry and Interferometry

Mel Siegel
Tech. Report, CMU-RI-TR-88-15, Robotics Institute, Carnegie Mellon University, September, 1988
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BibTeX

@techreport{Siegel-1988-15423,
author = {Mel Siegel},
title = {Remote High Speed Measurement of Small Diameters by Optical Diffractometry and Interferometry},
year = {1988},
month = {September},
institute = {Carnegie Mellon University},
address = {Pittsburgh, PA},
number = {CMU-RI-TR-88-15},
}
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